Oxalyl fluoride: Difference between revisions

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	{{chembox		{{chembox
			\| Verifiedfields = changed
⚫	\| verifiedrevid = ~~403156369~~
			\| Watchedfields = changed
		⚫	\| verifiedrevid = 415641747
	\| ImageFileL1 = Oxalyl fluoride.svg		\| ImageFileL1 = Oxalyl fluoride.svg
	\| ImageSizeL1 = 110px		\| ImageSizeL1 = 110px
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	\| ImageSizeR1 = 120px		\| ImageSizeR1 = 120px
	\| ImageNameR1 = Ball-and-stick model of oxalyl fluoride		\| ImageNameR1 = Ball-and-stick model of oxalyl fluoride
	\| ~~IUPACName~~ = Oxalyl difluoride		\| PIN = Oxalyl difluoride
	\| OtherNames = ~~Oxalyl fluoride, ethanedioyl difluoride~~		\| OtherNames = TL-108
	\| Section1 = {{Chembox Identifiers		\|Section1={{Chembox Identifiers
			\| CASNo_Ref = {{cascite\|correct\|??}}
	\| CASNo = 359-40-0
	\| ~~PubChem~~ = ~~9668~~		\| CASNo = 359-40-0
			\| UNII_Ref = {{fdacite\|correct\|FDA}}
⚫	\| EINECS = 206-630-4
			\| UNII = 2L7RR7QFL9
⚫	\| SMILES = C(=O)(C(=O)F)F
			\| PubChem = 9668
⚫	\| InChI = 1/C2F2O2/c3-1(5)2(4)6
		⚫	\| EINECS = 206-630-4
		⚫	\| SMILES = C(=O)(C(=O)F)F
		⚫	\| InChI = 1/C2F2O2/c3-1(5)2(4)6
			\| ChemSpiderID_Ref = {{chemspidercite\|changed\|chemspider}}
			\| ChemSpiderID = 9287
	}}		}}
	\| Section2 = {{Chembox Properties		\|Section2={{Chembox Properties
	\| Formula = C<sub>2</sub>F<sub>2</sub>O<sub>2</sub>		\| Formula = C<sub>2</sub>F<sub>2</sub>O<sub>2</sub>
	\| MolarMass = 94.017 g/mol		\| MolarMass = 94.017 g/mol
	\| Appearance =		\| Appearance =
	\| Density =		\| Density =
	\| ~~MeltingPt~~ =		\| MeltingPtC = -3
	\| ~~BoilingPt~~ =		\| BoilingPtC = 26.6
	\| Solubility =		\| Solubility =
⚫	}}
⚫	\| Section3 = {{Chembox Hazards
⚫	\| MainHazards =
⚫	\| FlashPt =
	\| Autoignition =
	}}		}}
		⚫	\|Section3={{Chembox Hazards
		⚫	\| MainHazards =
		⚫	\| FlashPt =
			\| AutoignitionPt =
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			'''Oxalyl fluoride''' is the ] with the formula (COF)<sub>2</sub>. It is a ] derivative of ]. This colorless liquid is prepared by reaction of ] with ].<ref>{{cite journal\|doi=10.1021/jo01081a050\|title=Synthesis of Fluorides by Metathesis with Sodium Fluoride\|author=C. W. Tullock, D. D. Coffman\|journal=J. Org. Chem.\|year=1960\|volume=25\|issue=11\|page=2016–2019}}</ref>
⚫	~~'''~~Oxalyl fluoride~~''' is a ] derivative of ]. It~~ is being investigated for use in etching as a replacement for compounds which have the liability of high ].<ref>, US Patent 6635185.</ref><ref>{{cite journal\|title=Evaluation of Oxalyl Fluoride for a Dielectric Etch Application in an Inductively Coupled Plasma Etch Tool\|journal=J. Electrochem. Soc.\|volume= 148\|issue= 3\|pages= G141–G149\|year=2001\|~~author~~=Simon Karecki, Ritwik Chatterjee, Laura Pruette, Rafael Reif, Terry Sparks, Laurie Beu, Victor Vartanian~~, and~~ Konstantin Novoselovc\|doi=10.1149/1.1348263}}</ref>

		⚫	Oxalyl fluoride is being investigated for use in etching as a replacement for compounds which have the liability of high ].<ref>, US Patent 6635185.</ref><ref>{{cite journal\|title=Evaluation of Oxalyl Fluoride for a Dielectric Etch Application in an Inductively Coupled Plasma Etch Tool\|journal=J. Electrochem. Soc.\|volume= 148\|issue= 3\|pages= G141–G149\|year=2001\|author1=Simon Karecki \|author2=Ritwik Chatterjee \|author3=Laura Pruette \|author4=Rafael Reif \|author5=Terry Sparks \|author6=Laurie Beu \|author7=Victor Vartanian \|author8=Konstantin Novoselovc \|name-list-style=amp \|doi=10.1149/1.1348263\|bibcode=2001JElS..148G.141K}}</ref>

	==See also==		==See also==
	* ]		* ]
			* ]
			* ]
			* ]

	==References==		==References==
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	]		]
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	{{Organohalide-stub}}		{{Organohalide-stub}}

Latest revision as of 13:23, 25 August 2022

Oxalyl fluoride

Names

Preferred IUPAC name Oxalyl difluoride

Other names TL-108

Identifiers

CAS Number

359-40-0

3D model (JSmol)

Interactive image

ChemSpider

9287

ECHA InfoCard

100.006.029

EC Number

206-630-4

PubChem CID

9668

UNII

2L7RR7QFL9

CompTox Dashboard (EPA)

DTXSID9059888

InChI

InChI=1/C2F2O2/c3-1(5)2(4)6

SMILES

C(=O)(C(=O)F)F

Properties

C₂F₂O₂

94.017 g/mol

−3 °C (27 °F; 270 K)

26.6 °C (79.9 °F; 299.8 K)

Except where otherwise noted, data are given for materials in their standard state (at 25 °C , 100 kPa).

N verify (what is ?) Infobox references

Chemical compound

Oxalyl fluoride is the organofluorine compound with the formula (COF)₂. It is a fluorinated derivative of oxalic acid. This colorless liquid is prepared by reaction of sodium fluoride with oxalyl chloride.

Oxalyl fluoride is being investigated for use in etching as a replacement for compounds which have the liability of high global warming potential.

References

C. W. Tullock, D. D. Coffman (1960). "Synthesis of Fluorides by Metathesis with Sodium Fluoride". J. Org. Chem. 25 (11): 2016–2019. doi:10.1021/jo01081a050.
Method of etching and cleaning using fluorinated carbonyl compounds, US Patent 6635185.
Simon Karecki; Ritwik Chatterjee; Laura Pruette; Rafael Reif; Terry Sparks; Laurie Beu; Victor Vartanian & Konstantin Novoselovc (2001). "Evaluation of Oxalyl Fluoride for a Dielectric Etch Application in an Inductively Coupled Plasma Etch Tool". J. Electrochem. Soc. 148 (3): G141 – G149. Bibcode:2001JElS..148G.141K. doi:10.1149/1.1348263.

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Latest revision as of 13:23, 25 August 2022

See also

References