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Oxalyl fluoride

Names
IUPAC name Oxalyl difluoride
Other names Oxalyl fluoride, ethanedioyl difluoride
Identifiers
CAS Number	359-40-0
3D model (JSmol)	Interactive image
ECHA InfoCard	100.006.029
EC Number	206-630-4
PubChem CID	9668
CompTox Dashboard (EPA)	DTXSID9059888
InChI InChI=1/C2F2O2/c3-1(5)2(4)6
SMILES C(=O)(C(=O)F)F
Properties
Chemical formula	C2F2O2
Molar mass	94.017 g/mol
Except where otherwise noted, data are given for materials in their standard state (at 25 °C , 100 kPa). Y verify (what is  ?) Infobox references

Oxalyl fluoride is a fluorinated derivative of oxalic acid. It is being investigated for use in etching as a replacement for compounds which have the liability of high global warming potential.

See also

• Oxalyl chloride

References

1. Method of etching and cleaning using fluorinated carbonyl compounds, US Patent 6635185.
2. Simon Karecki, Ritwik Chatterjee, Laura Pruette, Rafael Reif, Terry Sparks, Laurie Beu, Victor Vartanian, and Konstantin Novoselovc (2001). "Evaluation of Oxalyl Fluoride for a Dielectric Etch Application in an Inductively Coupled Plasma Etch Tool". J. Electrochem. Soc. 148 (3): G141 – G149. doi:10.1149/1.1348263.{{cite journal}}: CS1 maint: multiple names: authors list (link)

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